Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532484 | Plasma processing apparatus and plasma processing method | Taku Iwase, Takao Arase, Satoshi Terakura, Hayato Watanabe | 2022-12-20 |
| 11456183 | Plasma processing method and plasma ashing apparatus | Toru Ito, Tadamitsu Kanekiyo | 2022-09-27 |
| 11424106 | Plasma processing apparatus | Yuki Kondo, Kenetsu Yokogawa, Satoshi Une, Kazunori Nakamoto | 2022-08-23 |
| 11355322 | Plasma processing apparatus and plasma processing method | Taku Iwase, Takao Arase, Kenetsu Yokogawa | 2022-06-07 |