Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11276555 | Charged particle beam apparatus, composite charged particle beam apparatus, and control method for charged particle beam apparatus | Koji Nagahara | 2022-03-15 |
| 11257655 | Focused ion beam apparatus, and control method for focused ion beam apparatus | Naoko Hirose | 2022-02-22 |