Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11276555 | Charged particle beam apparatus, composite charged particle beam apparatus, and control method for charged particle beam apparatus | Yasuhiko Sugiyama | 2022-03-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11276555 | Charged particle beam apparatus, composite charged particle beam apparatus, and control method for charged particle beam apparatus | Yasuhiko Sugiyama | 2022-03-15 |