Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11309165 | Gas showerhead, manufacturing method, and plasma apparatus including the gas showerhead | Tuqiang Ni, Jiawei Jiang | 2022-04-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11309165 | Gas showerhead, manufacturing method, and plasma apparatus including the gas showerhead | Tuqiang Ni, Jiawei Jiang | 2022-04-19 |