Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11345996 | Liner assemblies for substrate processing systems | Arash Abedijaberi | 2022-05-31 |
| 11282739 | Methods for removing an oxide film from a SOI structure and methods for preparing a SOI structure | Charles R. Lottes, Henry F. Erk | 2022-03-22 |
| 11239107 | High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiency | Gang Wang, Jeffrey L. Libbert, Qingmin Liu | 2022-02-01 |