Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11228156 | Laser system and extreme ultraviolet light generation system | Yuta Takashima | 2022-01-18 |
| 11219116 | Extreme ultraviolet light generation system and electronic device manufacturing method | Yuta Takashima, Yuichi Nishimura, Takayuki Yabu | 2022-01-04 |