Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11219116 | Extreme ultraviolet light generation system and electronic device manufacturing method | Yuta Takashima, Yuichi Nishimura, Yoshifumi Ueno | 2022-01-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11219116 | Extreme ultraviolet light generation system and electronic device manufacturing method | Yuta Takashima, Yuichi Nishimura, Yoshifumi Ueno | 2022-01-04 |