Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11281103 | Composition for forming upper layer film, pattern forming method, resist pattern, and method for manufacturing electronic device | Naoya HATAKEYAMA, Naoki Inoue, Michihiro SHIRAKAWA, Akiyoshi GOTO | 2022-03-22 |
| 11249395 | Pattern forming method, method for manufacturing electronic device, laminate film, and composition for forming upper layer film | Naoki Inoue, Michihiro SHIRAKAWA, Akiyoshi GOTO | 2022-02-15 |