Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11453734 | Treatment liquid and pattern forming method | Tetsuya KAMIMURA, Tadashi OOMATSU | 2022-09-27 |
| 11281103 | Composition for forming upper layer film, pattern forming method, resist pattern, and method for manufacturing electronic device | Naoya HATAKEYAMA, Naoki Inoue, Naohiro TANGO, Akiyoshi GOTO | 2022-03-22 |
| 11249395 | Pattern forming method, method for manufacturing electronic device, laminate film, and composition for forming upper layer film | Naoki Inoue, Naohiro TANGO, Akiyoshi GOTO | 2022-02-15 |