Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11534868 | Device and method for separating a temporarily bonded substrate stack | Boris Povazay, Thomas Uhrmann | 2022-12-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11534868 | Device and method for separating a temporarily bonded substrate stack | Boris Povazay, Thomas Uhrmann | 2022-12-27 |