Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11534868 | Device and method for separating a temporarily bonded substrate stack | Elisabeth Brandl, Thomas Uhrmann | 2022-12-27 |
| 11460777 | Method and device for exposure of photosensitive layer | Bernhard Thallner | 2022-10-04 |