Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11466038 | Vapor deposition precursor compounds and process of use | Philip S. H. Chen, Bryan C. Hendrix, Thomas H. Baum, David Kuiper | 2022-10-11 |
| 11380539 | Selective deposition of silicon nitride | Han Wang, Bryan C. Hendrix, Thomas H. Baum | 2022-07-05 |