Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11466038 | Vapor deposition precursor compounds and process of use | Philip S. H. Chen, Eric Condo, Thomas H. Baum, David Kuiper | 2022-10-11 |
| 11421320 | Chemical delivery system and method of operating the chemical delivery system | David James Eldridge, David Walter Peters, Robert Wright, Jr., Scott L. Battle, John N. Gregg | 2022-08-23 |
| 11414750 | Method for forming carbon rich silicon-containing films | Sungsil Cho, Seobong Chang, Jae-eon Park, Thomas H. Baum | 2022-08-16 |
| 11380539 | Selective deposition of silicon nitride | Han Wang, Eric Condo, Thomas H. Baum | 2022-07-05 |
| 11371138 | Chemical vapor deposition processes using ruthenium precursor and reducing gas | Philip S. H. Chen, Thomas H. Baum | 2022-06-28 |