Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11340163 | Method and apparatus for detecting facet region, wafer producing method, and laser processing apparatus | Yusaku Ito, Kazuya Hirata | 2022-05-24 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11340163 | Method and apparatus for detecting facet region, wafer producing method, and laser processing apparatus | Yusaku Ito, Kazuya Hirata | 2022-05-24 |