Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11489590 | Optical link and coherent receiver noise characterization | Jörg Leykauf, Israa Slim, Yi Tang | 2022-11-01 |
| 11415894 | Projection exposure system for semiconductor lithography having an optical arrangement | Judith Fingerhuth, Norbert Wabra, Ferdinand Djuric-Rissner, Peter Graf, Reimar Finken | 2022-08-16 |