Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11415894 | Projection exposure system for semiconductor lithography having an optical arrangement | Judith Fingerhuth, Sonja Schneider, Ferdinand Djuric-Rissner, Peter Graf, Reimar Finken | 2022-08-16 |