Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11448968 | Beam-forming and illuminating system for a lithography system, lithography system, and method | Klaus Abele, Björn Liebaug | 2022-09-20 |
| 11422470 | Imaging optical unit for EUV microlithography | Johannes Ruoff | 2022-08-23 |