Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11448968 | Beam-forming and illuminating system for a lithography system, lithography system, and method | Hubert Holderer, Klaus Abele | 2022-09-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11448968 | Beam-forming and illuminating system for a lithography system, lithography system, and method | Hubert Holderer, Klaus Abele | 2022-09-20 |