Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11360401 | Alignment apparatus, alignment method, lithography apparatus, and method of manufacturing article | Genki Murayama | 2022-06-14 |
SE
Shinichi Egashira
Overall (2022): #263,808 of 548,613Top 50%
1
Patents 2022