Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11360401 | Alignment apparatus, alignment method, lithography apparatus, and method of manufacturing article | Shinichi Egashira | 2022-06-14 |
| 11249401 | Position detection apparatus, position detection method, lithography apparatus, and method of manufacturing article | — | 2022-02-15 |