Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11243179 | Inspection tool, lithographic apparatus, electron beam source and an inspection method | Erwin Paul SMAKMAN, Albertus Victor Gerardus MANGNUS | 2022-02-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11243179 | Inspection tool, lithographic apparatus, electron beam source and an inspection method | Erwin Paul SMAKMAN, Albertus Victor Gerardus MANGNUS | 2022-02-08 |