Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11442368 | Inspection tool, inspection method and computer program product | Richard Quintanilha, Scott Anderson Middlebrooks, Adrianus Cornelis Matheus Koopman | 2022-09-13 |
| 11243179 | Inspection tool, lithographic apparatus, electron beam source and an inspection method | Erwin Paul SMAKMAN, Thomas Jarik HUISMAN | 2022-02-08 |