Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11347154 | Cleaning a structure surface in an EUV chamber | Jonghoon Baek, John Tom Stewart, IV, Andrew David LaForge, Deniz Van Heijnsbergen, David Robert Evans +2 more | 2022-05-31 |