Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11347154 | Cleaning a structure surface in an EUV chamber | Chunguang Xia, John Tom Stewart, IV, Andrew David LaForge, Deniz Van Heijnsbergen, David Robert Evans +2 more | 2022-05-31 |
| 11339475 | Film stack overlay improvement | Xinhai Han, Deenesh Padhi, Daemian Raj Benjamin Raj, Kristopher Enslow, Wenjiao Wang +8 more | 2022-05-24 |
| 11264482 | Semiconductor device including dummy gate patterns and manufacturing method thereof | Donghyun Kim, Inhyun Song, Yeongmin JEON, Sejin Park, Juyun Park +2 more | 2022-03-01 |