Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11287747 | End facet protection for a radiation source and a method for use in metrology applications | Patrick Sebastian Uebel, Amir ABDOLVAND, Sebastian Thomas Bauerschmidt, Peter Maximilian Götz, Natallia Eduardauna Uzunbajakava | 2022-03-29 |
| 11287752 | Cooling apparatus and plasma-cleaning station for cooling apparatus | Adrianus Hendrik Koevoets, Cornelis Adrianus De Meijere, Willem Michiel De Rapper, Sjoerd Nicolaas Lambertus Donders, Jan Groenewold +4 more | 2022-03-29 |