Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11287747 | End facet protection for a radiation source and a method for use in metrology applications | Andrey Nikipelov, Patrick Sebastian Uebel, Sebastian Thomas Bauerschmidt, Peter Maximilian Götz, Natallia Eduardauna Uzunbajakava | 2022-03-29 |