Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515187 | Fast FOUP swapping with a FOUP handler | Jeroen Fluit | 2022-11-29 |
| 11515188 | Wafer boat handling device, vertical batch furnace and method | Christianus G.M. de Ridder | 2022-11-29 |
| 11230766 | Substrate processing apparatus and method | Dieter Pierreux, Cornelis Thaddeus Herbschleb, Werner Knaepen, Bert Jongbloed, Steven R. A. Van Aerde +3 more | 2022-01-25 |
| 11232963 | Substrate processing apparatus and method | — | 2022-01-25 |