Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515187 | Fast FOUP swapping with a FOUP handler | Theodorus G.M. Oosterlaken | 2022-11-29 |
| 11447864 | Layer forming method and apparatus | — | 2022-09-20 |
| 11378337 | Door opener and substrate processing apparatus provided therewith | — | 2022-07-05 |