Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11443926 | Substrate processing apparatus | WonKi Jeong, HaSeok Jang | 2022-09-13 |
| 11430640 | Substrate processing apparatus | WonKi Jeong, HaSeok Jang | 2022-08-30 |
| 11401605 | Substrate processing apparatus | JaeMin Roh | 2022-08-02 |