Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11401605 | Substrate processing apparatus | JuIll Lee | 2022-08-02 |
| 11251068 | Substrate processing apparatus and substrate processing method | DaeYoun Kim, Julll Lee, Changmin Lee | 2022-02-15 |