Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482533 | Apparatus and methods for plug fill deposition in 3-D NAND applications | Bokheon Kim, Alexandros T. Demos | 2022-10-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482533 | Apparatus and methods for plug fill deposition in 3-D NAND applications | Bokheon Kim, Alexandros T. Demos | 2022-10-25 |