Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482533 | Apparatus and methods for plug fill deposition in 3-D NAND applications | Bokheon Kim, David Kohen | 2022-10-25 |
| 11296189 | Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures | Chi-Wei Lo, Raj Kumar | 2022-04-05 |