Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11430654 | Initiation modulation for plasma deposition | Sanjay Kamath, Deenesh Padhi | 2022-08-30 |
| 11270903 | Multi zone electrostatic chuck | Sanjay Kamath, Deenesh Padhi | 2022-03-08 |