Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380575 | Film thickness uniformity improvement using edge ring and bias electrode geometry | Vladimir Nagorny, Wei Liu, Theresa Kramer Guarini, Bernard L. Hwang, Malcolm J. Bevan +2 more | 2022-07-05 |
KL
Kin Pong Lo
Overall (2022): #371,782 of 548,613Top 70%
1
Patents 2022