Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521830 | Ceramic coated quartz lid for processing chamber | — | 2022-12-06 |
| 11380575 | Film thickness uniformity improvement using edge ring and bias electrode geometry | Kin Pong Lo, Vladimir Nagorny, Wei Liu, Theresa Kramer Guarini, Malcolm J. Bevan +2 more | 2022-07-05 |