Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11520358 | Gas-pulsing-based shared precursor distribution system and methods of use | Michael R. Rice, Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez +4 more | 2022-12-06 |
| 11236834 | Diaphragm valves and methods of operating same | Balarabe Mohammed, Sohrab Zokaei, Ming Xu | 2022-02-01 |