Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11446711 | Steam treatment stations for chemical mechanical polishing system | Haosheng Wu, Hari Soundararajan, Shou-Sung Chang, Hui Chen, Chih Chung Chou +2 more | 2022-09-20 |
| 11298794 | Chemical mechanical polishing using time share control | Jimin Zhang, Brian J. Brown, Wei Lu, Priscilla Diep | 2022-04-12 |