Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11446711 | Steam treatment stations for chemical mechanical polishing system | Haosheng Wu, Jianshe Tang, Hari Soundararajan, Shou-Sung Chang, Chih Chung Chou +2 more | 2022-09-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11446711 | Steam treatment stations for chemical mechanical polishing system | Haosheng Wu, Jianshe Tang, Hari Soundararajan, Shou-Sung Chang, Chih Chung Chou +2 more | 2022-09-20 |