Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11408069 | Method for producing metallic ruthenium thin film by atomic layer deposition | Akihiro Nishida | 2022-08-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11408069 | Method for producing metallic ruthenium thin film by atomic layer deposition | Akihiro Nishida | 2022-08-09 |