Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11408069 | Method for producing metallic ruthenium thin film by atomic layer deposition | Masaki ENZU | 2022-08-09 |
| 11335896 | Method for producing yttrium oxide-containing thin film by atomic layer deposition | Atsushi Yamashita | 2022-05-17 |