Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515168 | Capacitively coupled plasma etching apparatus | Tuqiang Ni, Jie Liang, Jinlong Zhao | 2022-11-29 |
| 11373843 | Capacitively coupled plasma etching apparatus | Tuqiang Ni, Jie Liang, Jinlong Zhao, Lei Wu | 2022-06-28 |