Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170975 | Ion implantation apparatus | Heung Woo Park, Jong Moo Choi, Sung Ki Kim | 2021-11-09 |
| 11037931 | Method for fabricating semiconductor device | Keewoung Choi, Sung Ki Kim | 2021-06-15 |
| 10923311 | Cathode for ion source comprising a tapered sidewall | Keewoung Choi, Jong Moo Choi, Heung Woo Park | 2021-02-16 |