Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170975 | Ion implantation apparatus | Heung Woo Park, Hasung Lee, Sung Ki Kim | 2021-11-09 |
| 10923311 | Cathode for ion source comprising a tapered sidewall | Keewoung Choi, Heung Woo Park, Hasung Lee | 2021-02-16 |