Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971361 | Laser annealing method, laser annealing apparatus, and thin film transistor substrate | — | 2021-04-06 |
| 10950437 | Laser annealing method, laser annealing apparatus, and thin film transistor substrate | — | 2021-03-16 |
| 10896817 | Laser irradiation apparatus, thin film transistor, and method of manufacturing thin film transistor | Nobutake Nodera, Yoshiaki Matsushima, Masakazu Tanaka, Takao Matsumoto | 2021-01-19 |
| 10896978 | Oxide semiconductor device and method for manufacturing same | Tetsuya Goto | 2021-01-19 |