Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133333 | Producing method for thin film transistor with different crystallinities | Yuta Sugawara, Masakazu Tanaka, Takao Matsumoto | 2021-09-28 |
| 11004682 | Laser annealing apparatus, laser annealing method, and mask | Yoshiaki Matsushima, Takeshi Uno, Yuta Sugawara, Kota Imanishi, Takao Matsumoto | 2021-05-11 |
| 10937651 | Laser annealing method | Masakazu Tanaka, Shinji Koiwa, Kouichi Karatani, Akihiro Shinozuka, Takao Matsumoto | 2021-03-02 |
| 10896817 | Laser irradiation apparatus, thin film transistor, and method of manufacturing thin film transistor | Michinobu Mizumura, Yoshiaki Matsushima, Masakazu Tanaka, Takao Matsumoto | 2021-01-19 |