Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11056323 | Sputtering apparatus and method of forming film | Shinya Nakamura | 2021-07-06 |
| 10934616 | Cathode device and sputtering apparatus | Katsuaki Nakano | 2021-03-02 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11056323 | Sputtering apparatus and method of forming film | Shinya Nakamura | 2021-07-06 |
| 10934616 | Cathode device and sputtering apparatus | Katsuaki Nakano | 2021-03-02 |