Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10975465 | Method of forming internal stress control film | Daisuke Hiramatsu, Yukinobu Numata | 2021-04-13 |
| 10934616 | Cathode device and sputtering apparatus | Yukihito Tashiro | 2021-03-02 |