Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11111577 | Film-forming apparatus and film-forming method | Yousuke Kobayashi, Harunori Iwai, Atsuhito Ihori, Noriaki Tani | 2021-09-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11111577 | Film-forming apparatus and film-forming method | Yousuke Kobayashi, Harunori Iwai, Atsuhito Ihori, Noriaki Tani | 2021-09-07 |