AI

Atsuhito Ihori

UL Ulvac: 1 patents #11 of 68Top 20%
Overall (2021): #522,761 of 548,734Top 100%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11111577 Film-forming apparatus and film-forming method Yousuke Kobayashi, Harunori Iwai, Tetsushi Fujinaga, Noriaki Tani 2021-09-07