Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11119059 | Semiconductor defect inspection apparatus and semiconductor defect inspection method | — | 2021-09-14 |
| 10915018 | Imprinting system, method of manufacturing semiconductor device, and recording medium | Takahito Nishimura, Yoshihisa Kawamura, Hironobu Tamura, Suigen Kanda | 2021-02-09 |
| 10890539 | Semiconductor defect inspection apparatus | Hiroaki Shirakawa | 2021-01-12 |